Alignment of nanoparticles, nanorods, and nanowires during chemical vapor deposition of silicon.

We fabricated silicon nanostructures (Si-NSs) on SiO/Si substrate in chemical vapor deposition. During the synthesis of Si-NSs, Si sunflower-shaped structures of one to hundred microns were observed, therein the nanoparticles (NPs), nanowires, and nanorods were aligned in an ordered manner. We suggest that the NSs reported here are evolved by the electrostatic force exerted by charged NPs in gas phase. This NS would help in understanding the role of spontaneous charging of NPs in the gas phase and the role of charged NPs in the gas phase for NSs growth. [ABSTRACT FROM AUTHOR]