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Absolute ultra-precision measurement of high-numerical-aperture spherical surface by high-order shift-rotation method using Zernike polynomials.
- Source :
-
Optics Communications . Nov2015, Vol. 355, p191-199. 9p. - Publication Year :
- 2015
-
Abstract
- We propose a high-order shift-rotation absolute ultra-precision measurement method to calibrate the misalignment aberration and reference surface deviation in high-numerical-aperture spherical surface testing. Based on high-order approximation, the high-order misalignment aberrations are deduced. Both the computer simulation and experimental results confirm the feasibility of the proposed absolute ultra-precision measurement method. The high-order misalignment aberrations and reference surface deviation can be removed from the measured results by our absolute measurement method. The high-order shift-rotation absolute measurement method can get the accuracy of nanometer level in high-numerical-aperture spherical surface testing. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00304018
- Volume :
- 355
- Database :
- Academic Search Index
- Journal :
- Optics Communications
- Publication Type :
- Academic Journal
- Accession number :
- 109981695
- Full Text :
- https://doi.org/10.1016/j.optcom.2015.06.033