Cite
A Monolithic High-Flow Knudsen Pump Using Vertical Al2O3 Channels in SOI.
MLA
An, Seungdo, et al. “A Monolithic High-Flow Knudsen Pump Using Vertical Al2O3 Channels in SOI.” Journal of Microelectromechanical Systems, vol. 24, no. 5, Oct. 2015, pp. 1606–15. EBSCOhost, https://doi.org/10.1109/JMEMS.2015.2426699.
APA
An, S., Qin, Y., & Gianchandani, Y. B. (2015). A Monolithic High-Flow Knudsen Pump Using Vertical Al2O3 Channels in SOI. Journal of Microelectromechanical Systems, 24(5), 1606–1615. https://doi.org/10.1109/JMEMS.2015.2426699
Chicago
An, Seungdo, Yutao Qin, and Yogesh B. Gianchandani. 2015. “A Monolithic High-Flow Knudsen Pump Using Vertical Al2O3 Channels in SOI.” Journal of Microelectromechanical Systems 24 (5): 1606–15. doi:10.1109/JMEMS.2015.2426699.