Study of magnetic properties and double resonance peaks of FeCoB/SiO2/FeCoSiB magnetic films.

Soft-magnetic multilayers with or without SiO 2 interlayer were fabricated on Si (111) substrates using magnetron sputtering. The static magnetic and high frequency electromagnetic properties of FeCoB(60 nm)/SiO 2 (6 nm)/FeCoSiB(t nm) or FeCoB(60 nm)/FeCoSiB(t nm)were systematically investigated. The experimental results showed that all multilayers had an in-plane uniaxial magnetic anisotropy and the interlayer of SiO 2 could decouple the different magnetic phases leading to steps in hysteresis loops. Two resonance peaks of complex permeability spectra were observed for FeCoB(60 nm)/SiO 2 (6 nm)/FeCoSiB(t nm) films. The method to adjust the resonance frequency and FWHM is simple and robust, which may be potential for industrial application. [ABSTRACT FROM AUTHOR]