Modeling and analysis of a novel rectangular voice coil motor for the 6-DOF fine stage of lithographic equipment.

This paper presents a novel rectangular voice coil motor (VCM) used in ultra-precision motion stage. The new analytical model of magnetic field is proposed to calculate the Lorentz force, this analytical model indicates that Lorentz force will change when coil of the VCM moves in the permanent magnet air gap. The result of finite element analysis and experiment are used to verify this analytical model. This method offers a theoretical basis for the design and optimization of the VCM. [ABSTRACT FROM AUTHOR]