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High-sensitivity chip calorimeter platform for sub-nano watt thermal measurement.
- Source :
-
Sensors & Actuators A: Physical . Apr2016, Vol. 241, p60-65. 6p. - Publication Year :
- 2016
-
Abstract
- High sensitivity, on-chip calorimeter platform using V 2 O 5 thin film thermistor was developed. Integration of a V 2 O 5 thermistor with a high temperature sensitivity of −2.2%/K with a vacuum insulated, suspended SiN membrane structure enabled a low thermal conductance of 12 μW/K and a direct detection of 10 nW of heat with an estimated detection limit of 570 pW. We also investigated the feasibility of integrating the platform with a microfluidic system, and, suggest that, based on numerical simulations, a further 5-fold lowering of detection limit may be possible. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09244247
- Volume :
- 241
- Database :
- Academic Search Index
- Journal :
- Sensors & Actuators A: Physical
- Publication Type :
- Academic Journal
- Accession number :
- 113868087
- Full Text :
- https://doi.org/10.1016/j.sna.2016.02.001