High-sensitivity chip calorimeter platform for sub-nano watt thermal measurement.

High sensitivity, on-chip calorimeter platform using V 2 O 5 thin film thermistor was developed. Integration of a V 2 O 5 thermistor with a high temperature sensitivity of −2.2%/K with a vacuum insulated, suspended SiN membrane structure enabled a low thermal conductance of 12 μW/K and a direct detection of 10 nW of heat with an estimated detection limit of 570 pW. We also investigated the feasibility of integrating the platform with a microfluidic system, and, suggest that, based on numerical simulations, a further 5-fold lowering of detection limit may be possible. [ABSTRACT FROM AUTHOR]