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Optical nanospectroscopy study of ion-implanted silicon and biological growth medium
- Source :
-
Journal of Alloys & Compounds . Jan2004, Vol. 362 Issue 1/2, p21. 5p. - Publication Year :
- 2004
-
Abstract
- The advent of scanning near-field optical microscopy (SNOM) has augmented at the microscopic level the usefulness of IR spectroscopy. Two-dimensional imaging of chemical constituents makes this a very attractive and powerful new approach. In this paper we present SNOM results on boron-doped silicon and on biological growth medium by means of shear-force, reflectivity and photocurrent measurements. Such experiments allowed us to identify boron clusters embedded in silicon and the distribution of growth medium constituents with a lateral resolution well below the diffraction limit. [Copyright &y& Elsevier]
- Subjects :
- *MICROSCOPY
*INFRARED spectroscopy
*SILICON
*SEMICONDUCTOR doping
Subjects
Details
- Language :
- English
- ISSN :
- 09258388
- Volume :
- 362
- Issue :
- 1/2
- Database :
- Academic Search Index
- Journal :
- Journal of Alloys & Compounds
- Publication Type :
- Academic Journal
- Accession number :
- 11468399
- Full Text :
- https://doi.org/10.1016/S0925-8388(03)00557-7