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Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors.
- Source :
-
Physica Status Solidi - Rapid Research Letters . May2016, Vol. 10 Issue 5, p420-425. 6p. - Publication Year :
- 2016
-
Abstract
- Metal-insulator-metal capacitors (MIMCAP) with stoichiometric SrTiO3 dielectric were deposited stacking two strontium titanate (STO) layers, followed by intermixing the grain determining Sr-rich STO seed layer, with the Ti-rich STO top layer. The resulted stoichiometric SrTiO3 would have a structure with less defects as demonstrated by internal photoemission experiments. Consequently, the leakage current density is lower compared to Sr-rich STO which allow further equivalent oxide thickness downscaling. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 18626254
- Volume :
- 10
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Physica Status Solidi - Rapid Research Letters
- Publication Type :
- Academic Journal
- Accession number :
- 115459878
- Full Text :
- https://doi.org/10.1002/pssr.201600036