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Nano-metrology: The art of measuring X-ray mirrors with slope errors <100 nrad.
- Source :
-
Review of Scientific Instruments . May2016, Vol. 87 Issue 5, p051902-1-051902-8. 8p. 3 Color Photographs, 1 Diagram, 6 Graphs. - Publication Year :
- 2016
-
Abstract
- We present a comprehensive investigation of the systematic and random errors of the nanometrology instruments used to characterize synchrotron X-ray optics at Diamond Light Source. With experimental skill and careful analysis, we show that these instruments used in combination are capable of measuring state-of-the-art X-ray mirrors. Examples are provided of how Diamond metrology data have helped to achieve slope errors of <100 nrad for optical systems installed on synchrotron beamlines, including: iterative correction of substrates using ion beam figuring and optimal clamping of monochromator grating blanks in their holders. Simulations demonstrate how random noise from the Diamond-NOM's autocollimator adds into the overall measured value of the mirror's slope error, and thus predict how many averaged scans are required to accurately characterize different grades of mirror. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 87
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 115874513
- Full Text :
- https://doi.org/10.1063/1.4949272