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Improving lateral resolution of ambient electrostatic force microscopy by intermittent contact method.
- Source :
-
Integrated Ferroelectrics . 2016, Vol. 169 Issue 1, p96-106. 11p. - Publication Year :
- 2016
-
Abstract
- Electrostatic force microscopy (EFM) including its derivative, Kelvin probe force microscopy, is widely used to investigate mesoscopic/ nanoscopic conducting/semiconducting structures and electrical interactions. However, the resolution of EFM in ambient is largely limited by the applicable force-detection techniques. This work demonstrates that the lateral resolution of ambient EFM can be significantly improved using an intermittent contact method in conjunction with a resonant multi-frequency method for electrostatic force detection. A lateral resolution of sub-10 nm is obtained. The high-resolution contrast reflects the variation of surface potential in sample on a nanoscale. The mechanism, which is attributed to the decreased effective tip-sample distance, is elucidated by theoretical analysis. The newly developed technique can be easily integrated with existing techniques to herald the next generation of high-resolution probe techniques for various nanoscopic applications. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10584587
- Volume :
- 169
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Integrated Ferroelectrics
- Publication Type :
- Academic Journal
- Accession number :
- 116291043
- Full Text :
- https://doi.org/10.1080/10584587.2016.1163200