Xenon Z-Pinch Discharge Plasma EUV Source Driven by Ultrashort Current Pulse.

MLA

Lu, Peng, et al. “Xenon Z-Pinch Discharge Plasma EUV Source Driven by Ultrashort Current Pulse.” IEEE Transactions on Plasma Science, vol. 44, no. 7, July 2016, pp. 1228–34. EBSCOhost, https://doi.org/10.1109/TPS.2016.2578957.

APA

Lu, P., Katsuki, S., & Akiyama, H. (2016). Xenon Z-Pinch Discharge Plasma EUV Source Driven by Ultrashort Current Pulse. IEEE Transactions on Plasma Science, 44(7), 1228–1234. https://doi.org/10.1109/TPS.2016.2578957

Chicago

Lu, Peng, Sunao Katsuki, and Hidenori Akiyama. 2016. “Xenon Z-Pinch Discharge Plasma EUV Source Driven by Ultrashort Current Pulse.” IEEE Transactions on Plasma Science 44 (7): 1228–34. doi:10.1109/TPS.2016.2578957.