Cite
Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology.
MLA
Bai, Liping, et al. “Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology.” IEEE Transactions on Systems, Man & Cybernetics. Systems, vol. 46, no. 10, Oct. 2016, pp. 1456–67. EBSCOhost, https://doi.org/10.1109/TSMC.2015.2501232.
APA
Bai, L., Wu, N., Li, Z., & Zhou, M. (2016). Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology. IEEE Transactions on Systems, Man & Cybernetics. Systems, 46(10), 1456–1467. https://doi.org/10.1109/TSMC.2015.2501232
Chicago
Bai, Liping, Naiqi Wu, Zhiwu Li, and MengChu Zhou. 2016. “Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology.” IEEE Transactions on Systems, Man & Cybernetics. Systems 46 (10): 1456–67. doi:10.1109/TSMC.2015.2501232.