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Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests.
- Source :
-
Sensors (14248220) . Sep2016, Vol. 16 Issue 9, p1499-1507. 9p. 1 Color Photograph, 5 Diagrams, 4 Graphs. - Publication Year :
- 2016
-
Abstract
- This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process. The size of the accelerometer is 1.5 × 1.5 mm2, thus fitting the 1.8 × 1.8 mm2 haptic actuator array cell. The detailed fabrication process of the miniaturized accelerometer is illustrated. Performance evaluation of the fabricated accelerometer is conducted by comparing it with a commercial piezoelectric accelerometer. The output current of the fabricated accelerometer increases linearly with the acceleration. The miniaturized ZnO NW accelerometer is feasible for acceleration measurement of small and lightweight devices. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 16
- Issue :
- 9
- Database :
- Academic Search Index
- Journal :
- Sensors (14248220)
- Publication Type :
- Academic Journal
- Accession number :
- 118400061
- Full Text :
- https://doi.org/10.3390/s16091499