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Structural and mechanical properties of magnetron-sputtered Al-Au thin films.
- Source :
-
Applied Physics A: Materials Science & Processing . Jan2017, Vol. 123 Issue 1, p1-8. 8p. 1 Black and White Photograph, 2 Diagrams, 3 Charts, 4 Graphs. - Publication Year :
- 2017
-
Abstract
- There is global interest in improving the mechanical properties of light metals such as aluminum (Al)-based alloys by tailoring their microstructures at the nanometer scale. On the other hand, gold (Au) has been widely applied as a wire bonding material due to its prominent ductility and conductivity. In this study, the microstructure, hardness and elastic modulus of DC magnetron-sputtered aluminum/gold (Al/Au) composite thin films of different thicknesses were investigated. It is shown that in addition to the formation of AlAu phase, additional Al and Au nanosegregated phases also formed. The Al/Au thin films of 600 and 800 nm thickness exhibit the maximum hardness (~5.40 GPa) and elastic modulus (~97.00 GPa). However, film thicknesses of 1000 and 1200 nm demonstrate a reduction in hardness and elastic modulus due to different growth mechanisms and the formation of voids that can be attributed to the Kirkendall phenomenon. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09478396
- Volume :
- 123
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Applied Physics A: Materials Science & Processing
- Publication Type :
- Academic Journal
- Accession number :
- 120927367
- Full Text :
- https://doi.org/10.1007/s00339-016-0708-1