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Features of germanium tetrafluoride reduction with hydrogen in inductively and capacitively coupled radiofrequency discharges.
- Source :
-
High Energy Chemistry . Jan2017, Vol. 51 Issue 1, p56-59. 4p. - Publication Year :
- 2017
-
Abstract
- The process of plasma-chemical conversion of germanium tetrafluoride in a radiofrequency discharge (13.56 MHz) has been studied. The dependences of the germanium yield on the specific energy input, the H/GeF molar ratio, and the total pressure have been measured. The maximum germanium yield is more than 95%. The minimum specific energy consumption at an energy input of 9 MJ/mol is 9.4 MJ/mol or 2.6 kW h/mol Ge. A mechanism of plasma-assisted reduction of germanium tetrafluoride under the given the experimental conditions has been proposed. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00181439
- Volume :
- 51
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- High Energy Chemistry
- Publication Type :
- Academic Journal
- Accession number :
- 121185801
- Full Text :
- https://doi.org/10.1134/S0018143916060072