Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints.

MLA

Yang, Fajun, et al. “Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints.” IEEE Transactions on Systems, Man & Cybernetics. Systems, vol. 47, no. 3, Mar. 2017, pp. 502–16. EBSCOhost, https://doi.org/10.1109/TSMC.2015.2507140.

APA

Yang, F., Wu, N., Qiao, Y., Zhou, M., & Li, Z. (2017). Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints. IEEE Transactions on Systems, Man & Cybernetics. Systems, 47(3), 502–516. https://doi.org/10.1109/TSMC.2015.2507140

Chicago

Yang, Fajun, NaiQi Wu, Yan Qiao, MengChu Zhou, and ZhiWu Li. 2017. “Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints.” IEEE Transactions on Systems, Man & Cybernetics. Systems 47 (3): 502–16. doi:10.1109/TSMC.2015.2507140.