Back to Search
Start Over
New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive.
- Source :
-
IEEE Transactions on Industrial Electronics . Dec2003, Vol. 50 Issue 6, p1337-1339. 3p. - Publication Year :
- 2003
-
Abstract
- In this paper, a new actuation scheme for the push-pull electrostatic microelectromechanical systems comb drive actuators is proposed. The displacement amplitude excited by the new form of driving voltages can be more than three times as large as that which is achievable using the conventional form for the same applied system voltage. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 02780046
- Volume :
- 50
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Industrial Electronics
- Publication Type :
- Academic Journal
- Accession number :
- 12202817
- Full Text :
- https://doi.org/10.1109/TIE.2003.819567