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New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive.

Authors :
Tao Zhao
Liang, Yung C.
Source :
IEEE Transactions on Industrial Electronics. Dec2003, Vol. 50 Issue 6, p1337-1339. 3p.
Publication Year :
2003

Abstract

In this paper, a new actuation scheme for the push-pull electrostatic microelectromechanical systems comb drive actuators is proposed. The displacement amplitude excited by the new form of driving voltages can be more than three times as large as that which is achievable using the conventional form for the same applied system voltage. [ABSTRACT FROM AUTHOR]

Subjects

Subjects :
*ACTUATORS
*MICROELECTROMECHANICAL systems
*AUTOMATIC control systems
*ELECTROSTATICS
*CONTROL theory (Engineering)
*ELECTROMECHANICAL devices

Details

Language :
English
ISSN :
02780046
Volume :
50
Issue :
6
Database :
Academic Search Index
Journal :
IEEE Transactions on Industrial Electronics
Publication Type :
Academic Journal
Accession number :
12202817
Full Text :
https://doi.org/10.1109/TIE.2003.819567
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