Cite
Kinetics of epitaxial growth of Si and SiGe films on (1 1 0) Si substrates
MLA
Sugiyama, N., et al. “Kinetics of Epitaxial Growth of Si and SiGe Films on (1 1 0) Si Substrates.” Applied Surface Science, vol. 224, no. 1–4, Mar. 2004, p. 188. EBSCOhost, https://doi.org/10.1016/j.apsusc.2003.08.097.
APA
Sugiyama, N., Moriyama, Y., Nakaharai, S., Tezuka, T., Mizuno, T., & Takagi, S. (2004). Kinetics of epitaxial growth of Si and SiGe films on (1 1 0) Si substrates. Applied Surface Science, 224(1–4), 188. https://doi.org/10.1016/j.apsusc.2003.08.097
Chicago
Sugiyama, N., Y. Moriyama, S. Nakaharai, T. Tezuka, T. Mizuno, and S. Takagi. 2004. “Kinetics of Epitaxial Growth of Si and SiGe Films on (1 1 0) Si Substrates.” Applied Surface Science 224 (1–4): 188. doi:10.1016/j.apsusc.2003.08.097.