A novel digitally tunable RF-MEMS disk resonator.

This paper presents a novel digitally tunable micro-electro-mechanical systems disk resonator with multiple split electrodes. Multiple whispering gallery modes (WGM) can be excited with various electrode combinations and different frequencies output are obtained by this simple digital-tuning scheme with one resonator. For a disk resonator of 32 μm in radius with 12 electrodes, resonance frequencies of 71-171 MHz are obtained by changing the electrode connections. An 12th WGM's has been achieved in the paper with a frequency of 313 MHz. This digitally tunable resonator device could simplify the frequency switching unit of a system clock, and dramatically reduce the power consumption of a digital system. [ABSTRACT FROM AUTHOR]