Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity.

An ultraviolet (UV) detector on single crystal chemical vapor deposition (CVD) diamond with three-dimensional (3D) metal electrodes, is designed, and fabricated with the aim to improve collection efficiency of photo-induced carriers. Interdigitated Ti/Au electrodes were formed within 10 μm deep groove etched in diamond to ensure a more uniform field pattern in the diamond bulk. In the preliminary tests the groove-shaped 3D device performance was compared to a detector with a conventional planar structure on the same material at applied electric field of 1 V/μm. It is found that the responsivity of the 3D electrode structure in the spectral range of 220–280 nm is up to 50% higher than that for the planar structure. [ABSTRACT FROM AUTHOR]