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Effective work-function control technique applicable to p-type FinFET high-k/metal gate devices.
- Source :
-
Microelectronics Reliability . May2017, Vol. 72, p80-84. 5p. - Publication Year :
- 2017
-
Abstract
- In this work, we investigated the effect of so-called WF (Work Function) setting anneal (high temperature annealing on TiN/HfO 2 stack) on gate stack properties. It was found that intermixed layer created in-between TiN and HfO 2 during WF setting anneal has negative fixed charge and reduces pFET V t (positive V t shift). In addition, higher anneal temperature further reduces pFET V t while keeping nFET V t almost unchanged. This could be explained by passivation of oxygen vacancies in HfO 2 with diffused oxygen from TiN layer. By combining these effects, one can further push effective work function towards valence band edge which enables wider coverage of transistor V t option. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00262714
- Volume :
- 72
- Database :
- Academic Search Index
- Journal :
- Microelectronics Reliability
- Publication Type :
- Academic Journal
- Accession number :
- 122911775
- Full Text :
- https://doi.org/10.1016/j.microrel.2017.04.004