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a-Si:H TFT-Silicon Hybrid Low-Energy X-Ray Detector.
- Source :
-
IEEE Transactions on Electron Devices . Apr2017, Vol. 64 Issue 4, p1624-1629. 6p. - Publication Year :
- 2017
-
Abstract
- Direct conversion crystalline silicon X-ray imagers are used for low-energy X-ray photon (4–20 keV) detection in scientific research applications such as protein crystallography. In this paper, we demonstrate a novel pixel architecture that integrates a crystalline silicon X-ray detector with a thin-film transistor amorphous silicon pixel readout circuit. We describe a simplified two-mask process to fabricate a complete imaging array and present preliminary results that show the fabricated pixel to be sensitive to 5.89-keV photons from a low activity Fe-55 gamma source. This paper presented can expedite the development of high spatial resolution, low cost, direct conversion imagers for X-ray diffraction and crystallography applications. [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 64
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 124146709
- Full Text :
- https://doi.org/10.1109/TED.2017.2671365