Gas sensing properties of NiO/SnO2 heterojunction thin film.

The application of conventional tin oxide thin film sensors is limited by its low response. In this study, a heterojunction thin film composed of nickel oxide deposited by electron beam evaporation and tin oxide prepared by radio-frequency (RF) magnetron sputtering has enhanced gaseous ethanol sensing properties. The 5 nm NiO/100 nm SnO 2 gas sensor shows the excellent response 7.9 at 250 °C for 100 ppm gaseous ethanol, good reproducibility, as well as good linearity. In addition, this sensor can measure the ultra-low concentration of gaseous ethanol, and the concentration can be as low as 100 ppb. The gas sensitive properties is related to the thickness of nickel oxide and the mechanism is discussed. [ABSTRACT FROM AUTHOR]