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Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber
- Source :
-
Nuclear Instruments & Methods in Physics Research Section A . Mar2004, Vol. 520 Issue 1-3, p456. 4p. - Publication Year :
- 2004
-
Abstract
- We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described. [Copyright &y& Elsevier]
- Subjects :
- *CALORIMETERS
*TEMPERATURE measuring instruments
*ALKALINE earth metals
*X-rays
Subjects
Details
- Language :
- English
- ISSN :
- 01689002
- Volume :
- 520
- Issue :
- 1-3
- Database :
- Academic Search Index
- Journal :
- Nuclear Instruments & Methods in Physics Research Section A
- Publication Type :
- Academic Journal
- Accession number :
- 12575069
- Full Text :
- https://doi.org/10.1016/j.nima.2003.11.371