A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing.

MLA

Nakata, Kouta, et al. “A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing, vol. 30, no. 4, Nov. 2017, pp. 339–44. EBSCOhost, https://doi.org/10.1109/TSM.2017.2753251.

APA

Nakata, K., Orihara, R., Mizuoka, Y., & Takagi, K. (2017). A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing, 30(4), 339–344. https://doi.org/10.1109/TSM.2017.2753251

Chicago

Nakata, Kouta, Ryohei Orihara, Yoshiaki Mizuoka, and Kentaro Takagi. 2017. “A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing 30 (4): 339–44. doi:10.1109/TSM.2017.2753251.