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An ultra-low specific on-resistance double-gate trench SOI LDMOS with P/N pillars.
- Source :
-
Superlattices & Microstructures . Dec2017, Vol. 112, p269-278. 10p. - Publication Year :
- 2017
-
Abstract
- A novel ultra-low specific on-resistance ( R on,sp ) trench lateral double-diffused MOSFET with P/N pillars and dual trench gates (P/N DTG-T LDMOS) based on silicon-on-insulator technology is proposed in this paper. The new structure features dual trench gates and heavily doping P/N pillars. The P/N pillars are inserted into the drift region under the P-well. The P-pillar causes an assistant depletion effect on the drift region. The N-pillar can not only improve the breakdown voltage (BV) by modulating the electric field but also significantly reduce the R on,sp by increasing the doping concentration of the drift region. Furthermore, the dual trench gates form dual conduction channels and the heavily doping N-pillar provides a lower resistance region for the carriers, which can both reduce the R on,sp . Consequently, compared with the conventional trench LDMOS, a lower R on,sp of 0.58 mΩ cm 2 and a higher the figure of merit (FOM, FOM=BV 2 / R on,sp ) of 62.9 MW/cm 2 are obtained for the P/N DTG-T LDMOS, which are improved by 74.8% and 308.4% respectively. Meanwhile, the BVs of the both structures are maintained at a same level of 190 V. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 07496036
- Volume :
- 112
- Database :
- Academic Search Index
- Journal :
- Superlattices & Microstructures
- Publication Type :
- Academic Journal
- Accession number :
- 126166077
- Full Text :
- https://doi.org/10.1016/j.spmi.2017.09.033