Micro-structure changes induced by femtosecond laser on the surface of GaN multilayer film grown on Si substrate.

MLA

He, Rong, et al. “Micro-Structure Changes Induced by Femtosecond Laser on the Surface of GaN Multilayer Film Grown on Si Substrate.” Applied Physics A: Materials Science & Processing, vol. 123, no. 11, Nov. 2017, pp. 1–8. EBSCOhost, https://doi.org/10.1007/s00339-017-1307-5.

APA

He, R., Ma, H., Zheng, J., Han, Y., Lu, Y., & Cai, C. (2017). Micro-structure changes induced by femtosecond laser on the surface of GaN multilayer film grown on Si substrate. Applied Physics A: Materials Science & Processing, 123(11), 1–8. https://doi.org/10.1007/s00339-017-1307-5

Chicago

He, Rong, Hongliang Ma, Jiahui Zheng, Yongmei Han, Yuming Lu, and Chuanbing Cai. 2017. “Micro-Structure Changes Induced by Femtosecond Laser on the Surface of GaN Multilayer Film Grown on Si Substrate.” Applied Physics A: Materials Science & Processing 123 (11): 1–8. doi:10.1007/s00339-017-1307-5.