High quality β-Ga2O3 film grown with N2O for high sensitivity solar-blind-ultraviolet photodetector with fast response speed.

High quality β -Ga 2 O 3 film is grown by using N 2 O as reaction gas for the fabrication of high performance solar-blind-ultraviolet photodetector. Compared with traditional solar-blind-ultraviolet photodetector based on β -Ga 2 O 3 film grown with O 2 , the reported solar-blind-ultraviolet photodetector exhibits higher photoresponsivity of 26.1 A/W, larger on/off ratio (I 255 nm light /I dark ) of 10 4 , and faster response speed (a rise time of 0.48 s and a decay time of 0.18 s at 10 V. The high photoresponsivity and fast response speed of the reported β -Ga 2 O 3 solar-blind-ultraviolet photodetector can be attributed to the reduction of scattering or/and trapped centre of photo-generated carriers formed in the film grown with N 2 O. [ABSTRACT FROM AUTHOR]