Cite
Temperature effects on Ge condensation by thermal oxidation of SiGe-on-insulator structures.
MLA
Sugiyama, N., et al. “Temperature Effects on Ge Condensation by Thermal Oxidation of SiGe-on-Insulator Structures.” Journal of Applied Physics, vol. 95, no. 8, Apr. 2004, pp. 4007–11. EBSCOhost, https://doi.org/10.1063/1.1649812.
APA
Sugiyama, N., Tezuka, T., Mizuno, T., Suzuki, M., Ishikawa, Y., Shibata, N., & Takagi, S. (2004). Temperature effects on Ge condensation by thermal oxidation of SiGe-on-insulator structures. Journal of Applied Physics, 95(8), 4007–4011. https://doi.org/10.1063/1.1649812
Chicago
Sugiyama, N., T. Tezuka, T. Mizuno, M. Suzuki, Y. Ishikawa, N. Shibata, and S. Takagi. 2004. “Temperature Effects on Ge Condensation by Thermal Oxidation of SiGe-on-Insulator Structures.” Journal of Applied Physics 95 (8): 4007–11. doi:10.1063/1.1649812.