Cite
Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation.
MLA
Qiao, Yan, et al. “Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation.” IEEE Transactions on Systems, Man & Cybernetics. Systems, vol. 48, no. 4, Apr. 2018, pp. 622–36. EBSCOhost, https://doi.org/10.1109/TSMC.2016.2600583.
APA
Qiao, Y., Wu, N., Zhou, M., Yang, F., & Zhu, Q. (2018). Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation. IEEE Transactions on Systems, Man & Cybernetics. Systems, 48(4), 622–636. https://doi.org/10.1109/TSMC.2016.2600583
Chicago
Qiao, Yan, NaiQi Wu, MengChu Zhou, FaJun Yang, and QingHua Zhu. 2018. “Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation.” IEEE Transactions on Systems, Man & Cybernetics. Systems 48 (4): 622–36. doi:10.1109/TSMC.2016.2600583.