Cite
Discrete relaxation method for contact layer decomposition of DSA with triple patterning.
MLA
Li, Xingquan, et al. “Discrete Relaxation Method for Contact Layer Decomposition of DSA with Triple Patterning.” Integration: The VLSI Journal, vol. 61, Mar. 2018, pp. 77–87. EBSCOhost, https://doi.org/10.1016/j.vlsi.2017.11.004.
APA
Li, X., Chen, J., & Zhu, W. (2018). Discrete relaxation method for contact layer decomposition of DSA with triple patterning. Integration: The VLSI Journal, 61, 77–87. https://doi.org/10.1016/j.vlsi.2017.11.004
Chicago
Li, Xingquan, Jianli Chen, and Wenxing Zhu. 2018. “Discrete Relaxation Method for Contact Layer Decomposition of DSA with Triple Patterning.” Integration: The VLSI Journal 61 (March): 77–87. doi:10.1016/j.vlsi.2017.11.004.