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Preparation and optimization of ZnO films on single-crystal diamond substrate by metal-organic chemical vapour deposition.
- Source :
-
Semiconductor Science & Technology . Jun2004, Vol. 19 Issue 6, p770-773. 4p. - Publication Year :
- 2004
-
Abstract
- High-quality ZnO thin films have been grown on single-crystal diamond substrates with (111) orientation, by low-pressure metal-organic chemical vapour deposition. X-ray diffraction spectra and photoluminescence (PL) spectra clearly showed that the quality of ZnO films was improved by the two-step growth method. Strong ultraviolet emissions and weak deep-level emissions with different intensity were both observed in the room-temperature PL spectrum. The change of surface morphology was also studied by atomic force microscopy. Zn and O elements in the deposited ZnO/diamond films were investigated by x-ray photoelectron spectroscopy, in which the statistical result of the ratio for O/Zn atoms of samples was about 1. Raman scattering was performed at room temperature. The E2, A1(TO) and E1(TO) mode peaks were seen at 437.46, 383 and 414.87 cm-1, which indicated a high crystalline quality for our samples. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 02681242
- Volume :
- 19
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Semiconductor Science & Technology
- Publication Type :
- Academic Journal
- Accession number :
- 13091425
- Full Text :
- https://doi.org/10.1088/0268-1242/19/6/020