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Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications.
- Source :
-
Journal of Microelectromechanical Systems . Aug2018, Vol. 27 Issue 4, p739-747. 9p. - Publication Year :
- 2018
-
Abstract
- This paper introduces a novel sensing element scheme to improve the accuracy of 2-D micromachined thermal wind sensor. The sensing element consists of eight heaters and eight thermistors placed on ceramic substrate. The octagon-arranged sixteen resistors are divided into two wind sensing groups, cross-type group and saltire-type group. These two groups monitor wind independently, and the final measured wind speed and direction are extracted from the measurement results of the two groups. Based on this octagon-sensing design, the sensor achieves higher accuracy for wind measurement, which is verified by the experiment. The results show that for the wind speed up to 33 m/s, the sensor has a measurement error less than ±1%, and the airflow direction over the full range of 360° is determined with a maximum error of ±1.5°. [2018-0045] [ABSTRACT FROM AUTHOR]
- Subjects :
- *THERMISTORS
*MICROMACHINING
*WIND speed
*AIR flow
*ELECTRIC heating systems
Subjects
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 27
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 131046873
- Full Text :
- https://doi.org/10.1109/JMEMS.2018.2849086