Total-Ionizing-Dose Effects on Al/SiO2 Bimorph Electrothermal Microscanners.

Total-ionizing-dose effects on electrothermal micro- scanners are investigated using 10-keV X-rays and 14.3-MeV oxygen ions. The corresponding changes in mechanical displacement are measured using an optical microscope. Applied dc voltage and/or radiation-induced charging lead to changes in the vertical position and resistance of the structures. Radiation-induced changes in the vertical position and resistance and postirradiation recovery or superrecovery of these quantities are sensitive to dc biases applied during and/or after irradiation. Simple electrostatic and computational models are qualitatively consistent with observed trends in device response. [ABSTRACT FROM AUTHOR]