Switching Voltage Analysis of Nanoelectromechanical Memory Switches for Monolithic 3-D CMOS-NEM Hybrid Reconfigurable Logic Circuits.

The accurate calculation of switching voltage (${V}_{s}$) is necessary for the reliable and low-power operation of monolithic 3-D (M3D) CMOS-nanoelectromechanical (NEM) hybrid reconfigurable logic circuits because ${V}_{s}$ corresponds to the operating voltage (${V}_{\text {dd}}$) of NEM memory switches. In this paper, based on the Euler–Bernoulli equation, the physics-based analytical model is proposed to determine ${V}_{s}$. The accuracy of the proposed model is verified by both the finite-element analysis and experimental results. Our proposed model shows >3% error compared with experimental data. Also, the design guidelines of NEM memory switches are presented in terms of minimum ${V}_{s}$ (${V}_{s\_{}{m}}$) and device dimensions. [ABSTRACT FROM AUTHOR]