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A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor.
- Source :
-
IEEE Transactions on Electron Devices . Dec2018, Vol. 65 Issue 12, p5494-5498. 5p. - Publication Year :
- 2018
-
Abstract
- A new generation of thermal sensors based on a suspended thermal transistor MOS (TMOS), fabricated in the standard CMOS-SOI process, released by postetching, has been recently developed. One of the important features of TMOS is its high responsivity due to the transistor built-in amplification and subthreshold operation enabling a wide range of battery applications. This paper focuses on a new gas sensor, dubbed GMOS, based on the TMOS. The GMOS is a catalytic gas sensor (pellistor-like), and as such detects combustible gases in air. The CMOS-SOI technology combined with tungsten metallization enables operation at very high temperatures (450 °C was tested). The sensors and readout are processed with the same CMOS-SOI technology. Accordingly, the GMOS sensor, processed in low-cost CMOS-SOI technology, promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes, as well as smartphones. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 65
- Issue :
- 12
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 133667834
- Full Text :
- https://doi.org/10.1109/TED.2018.2878015