Cite
Statistical Process Control for Monitoring the Particles With Excess Zero Counts in Semiconductor Manufacturing.
MLA
Tian, Wenxing, et al. “Statistical Process Control for Monitoring the Particles With Excess Zero Counts in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing, vol. 32, no. 1, Feb. 2019, pp. 93–103. EBSCOhost, https://doi.org/10.1109/TSM.2018.2882862.
APA
Tian, W., You, H., Zhang, C., Kang, S., Jia, X., & Chien, W.-T. K. (2019). Statistical Process Control for Monitoring the Particles With Excess Zero Counts in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing, 32(1), 93–103. https://doi.org/10.1109/TSM.2018.2882862
Chicago
Tian, Wenxing, Hailong You, Chunfu Zhang, Sheng Kang, Xinzhang Jia, and Wei-Ting Kary Chien. 2019. “Statistical Process Control for Monitoring the Particles With Excess Zero Counts in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing 32 (1): 93–103. doi:10.1109/TSM.2018.2882862.