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Low-loss microwave filters on CMOS-grade standard silicon substrate with low-k BCB dielectric.
- Source :
-
Microwave & Optical Technology Letters . 1/5/2004, Vol. 40 Issue 1, p9-12. 3p. 3 Diagrams, 1 Chart, 2 Graphs. - Publication Year :
- 2004
-
Abstract
- Benzocyclobutene (BCB), a low-k, photosensitive, easily patterned material is used as the interfacing layer that isolates the passive components from the lossy, low-resistivity silicon. Its performance is further improved by reducing the conductive loss with an electroplated and highly-conductive metal, namely, copper. Standard 50-Ω microstrip lines and a microstrip-transmission-line-based microwave filter, exhibiting insertion losses of 0.8 dB and 1.1 dB at 10 GHz, respectively, are demonstrated. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 40: 9–11, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.11271 [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 08952477
- Volume :
- 40
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Microwave & Optical Technology Letters
- Publication Type :
- Academic Journal
- Accession number :
- 13509264
- Full Text :
- https://doi.org/10.1002/mop.11271