Design and analysis of MEMS based piezoelectric energy harvester for machine monitoring application.

In this paper a new structure of MEMS based piezoelectric (PZ) energy harvester with resonant frequency of 100 Hz is proposed which can be integrated with machine monitoring wireless sensor nodes. Various geometries having different structures of PZ cantilevers have been investigated. The constant length of 5 mm is chosen for all the cantilever beams. A new Perforated Tapered shaped cantilever beam has been proposed. The achieved resonant frequency of the final proposed perforated Tapered structure with proof mass is 101 Hz, which is 27.5% lower than that of the commonly used rectangular structure having same dimensions (including proof mass). The peak voltage output of the proposed structure is 8.5 V which 97% higher than that of the commonly used rectangular structure. [ABSTRACT FROM AUTHOR]