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Fabrication of high fill-factor aspheric microlens array by dose-modulated lithography and low temperature thermal reflow.
- Source :
-
Microsystem Technologies . Apr2019, Vol. 25 Issue 4, p1235-1241. 7p. - Publication Year :
- 2019
-
Abstract
- A cost-effective fabrication method for high quality and high fill-factor aspheric microlens arrays (MLAs) is developed. In this method, the complex shape of aspheric microlens is pre-modeled via dose modulation in a digital micromirror device (DMD) based maskless projection lithography system. Digital masks for several bottom layers are replaced from circle to hexagon for the purpose of enhancing the fill-factor of MLAs, then a low temperature thermal reflow process is conducted, after which the average surface roughness of microlens is improved to ~ 0.427 nm while the pre-modeled profile keeps unchanged. Experimental results show that the fabricated aspheric MLAs have almost 100% fill-factor, high shape accuracy and high surface quality. The presented method may provide a promising approach for rapidly fabricating high quality and high fill-factor aspheric microlens in a simple and low-cost way. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09467076
- Volume :
- 25
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Microsystem Technologies
- Publication Type :
- Academic Journal
- Accession number :
- 135496386
- Full Text :
- https://doi.org/10.1007/s00542-018-4226-2