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Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film.
- Source :
-
Applied Physics Letters . Jun2019, Vol. 114 Issue 22, pN.PAG-N.PAG. 4p. 1 Diagram, 2 Graphs. - Publication Year :
- 2019
-
Abstract
- Lamb wave microresonators with wavelengths λ of 5–8 μm, vibrating in the S0 mode, and having 75 electrode pairs were fabricated and characterized. The results were compared to theoretical predictions obtained by finite element simulation. The active material was a 1 μm-thick Al0.85Sc0.15N thin film. Two types of acoustic isolation solutions were implemented: the first one with freestanding plates fixed by two bridges to a device frame [freestanding Lamb wave resonator (FS-LWR)] and the second one containing an acoustic W/SiO2 5-layer reflector [solidly mounted Lamb wave resonator (SM-LWR)]. All devices showed excellent agreement with FEM predictions, regarding resonance frequency and piezoelectric coupling. The quality factors of the SM-LWR devices were 5–6 times larger than the ones of the freestanding structures fabricated by the same Al0.85Sc0.15N deposition process: we achieved a figure of merit of 12–18 (Qp = 771, Qs = 507, k2 = 2.29%) at an operation frequency of 1430 MHz, which is so far the best performance realized with a MEMS Lamb wave resonator having a large number of electrode fingers. This performance opens up perspectives for filter applications. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 114
- Issue :
- 22
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 136880911
- Full Text :
- https://doi.org/10.1063/1.5088892