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An Algorithm for Resizing Polygonal Regions and Its Applications to LSI Mask Pattern Design.
- Source :
-
Electronics & Communications in Japan, Part 1: Communications . Apr84, Vol. 67 Issue 4, p93-101. 9p. - Publication Year :
- 1984
-
Abstract
- In this paper we consider the problem of resizing figures in a digitized XY coordinate plane. The figures are regions closed by line segment parallel to the X or Y axis or line segments at 45° angles to the axes. By resizing we mean that, given the closed regions and a change width, we expand or contract the input regions by the change width. After first proving some theorems on resizing, we response an algorithm solving the problem in running time 0 (n log n), where n is the number of vertices in the regions. For particular applications we consider examples using the algorithms for verifying compliance with design rules for the smallest feature size and spacing in a mask pattern, and also the compensation for characteristic machine error in pattern generators, apertures, etc. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 87566621
- Volume :
- 67
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Electronics & Communications in Japan, Part 1: Communications
- Publication Type :
- Academic Journal
- Accession number :
- 13794088
- Full Text :
- https://doi.org/10.1002/ecja.4400670412