Special issue: Plasmas for microfabrication.

Plasma-assisted microfabrication has been a topic of capital importance in the evolution of plasma science and technology, especially since the 1970s. To a large extent, one can associate this trend of growth with "Moore's Law", the observation that the number of transistors in a dense integrated circuit doubles about every 2 years. Currently, the overall performance of computer chips is limited by energy consumption and data communication speeds among the CPUs, caches, memories, and storage devices. [Extracted from the article]