Cite
Plasma Charge Accumulative Model in Quantitative FinFET Plasma Damage.
MLA
Tsai, Yi-Pei, et al. “Plasma Charge Accumulative Model in Quantitative FinFET Plasma Damage.” IEEE Transactions on Electron Devices, vol. 66, no. 8, Aug. 2019, pp. 3492–97. EBSCOhost, https://doi.org/10.1109/TED.2019.2919454.
APA
Tsai, Y.-P., Shih, J.-R., King, Y.-C., & Lin, C. J. (2019). Plasma Charge Accumulative Model in Quantitative FinFET Plasma Damage. IEEE Transactions on Electron Devices, 66(8), 3492–3497. https://doi.org/10.1109/TED.2019.2919454
Chicago
Tsai, Yi-Pei, Jiaw-Ren Shih, Ya-Chin King, and Chrong Jung Lin. 2019. “Plasma Charge Accumulative Model in Quantitative FinFET Plasma Damage.” IEEE Transactions on Electron Devices 66 (8): 3492–97. doi:10.1109/TED.2019.2919454.