Cite
Investigation of Fabrication Accuracy and Repeatability of High- $Q$ Silicon-Micromachined Narrowband Sub-THz Waveguide Filters.
MLA
Glubokov, Oleksandr, et al. “Investigation of Fabrication Accuracy and Repeatability of High- $Q$ Silicon-Micromachined Narrowband Sub-THz Waveguide Filters.” IEEE Transactions on Microwave Theory & Techniques, vol. 67, no. 9, Sept. 2019, pp. 3696–706. EBSCOhost, https://doi.org/10.1109/TMTT.2019.2926244.
APA
Glubokov, O., Zhao, X., Campion, J., Beuerle, B., Shah, U., & Oberhammer, J. (2019). Investigation of Fabrication Accuracy and Repeatability of High- $Q$ Silicon-Micromachined Narrowband Sub-THz Waveguide Filters. IEEE Transactions on Microwave Theory & Techniques, 67(9), 3696–3706. https://doi.org/10.1109/TMTT.2019.2926244
Chicago
Glubokov, Oleksandr, Xinghai Zhao, James Campion, Bernhard Beuerle, Umer Shah, and Joachim Oberhammer. 2019. “Investigation of Fabrication Accuracy and Repeatability of High- $Q$ Silicon-Micromachined Narrowband Sub-THz Waveguide Filters.” IEEE Transactions on Microwave Theory & Techniques 67 (9): 3696–3706. doi:10.1109/TMTT.2019.2926244.