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Molecular beam epitaxy growth of GaSb1-xBix without rotation.
- Source :
-
Vacuum . Oct2019, Vol. 168, pN.PAG-N.PAG. 1p. - Publication Year :
- 2019
-
Abstract
- GaSb 1-x Bi x thin film was grown on a 2 inch GaSb substrate by molecular beam epitaxy (MBE) without substrate rotation. Bi composition is found to vary from 2.76% to 3.98% across the wafer. The distribution of Bi content is mainly determined by spatial non-uniformity of Sb/Ga flux ratio, while Bi flux has slightly influence. Ostwald ripening process is confirmed to be reason for bigger Bi droplets via Bi surface diffusion. With the increase of Sb/Ga flux ratio, Ostwald ripening process is suppressed. At high Bi flux, excess Ga atoms accumulate on surface and form droplets. • Ostwald ripening of Bi droplets via Bi surface diffusion is confirmed. With the increase of Sb/Ga flux ratio, the Bi diffusion length decreases and Ostwald ripening is suppressed. • Ga droplets co-exist with the Bi droplets and their density increases with the decrease of the Sb/Ga flux ratio and the increase of the Bi flux. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 0042207X
- Volume :
- 168
- Database :
- Academic Search Index
- Journal :
- Vacuum
- Publication Type :
- Academic Journal
- Accession number :
- 138725784
- Full Text :
- https://doi.org/10.1016/j.vacuum.2019.108819