Cite
An Online Virtual Metrology Model With Sample Selection for the Tracking of Dynamic Manufacturing Processes With Slow Drift.
MLA
Feng, Jianshe, et al. “An Online Virtual Metrology Model With Sample Selection for the Tracking of Dynamic Manufacturing Processes With Slow Drift.” IEEE Transactions on Semiconductor Manufacturing, vol. 32, no. 4, Nov. 2019, pp. 574–82. EBSCOhost, https://doi.org/10.1109/TSM.2019.2942768.
APA
Feng, J., Jia, X., Zhu, F., Moyne, J., Iskandar, J., & Lee, J. (2019). An Online Virtual Metrology Model With Sample Selection for the Tracking of Dynamic Manufacturing Processes With Slow Drift. IEEE Transactions on Semiconductor Manufacturing, 32(4), 574–582. https://doi.org/10.1109/TSM.2019.2942768
Chicago
Feng, Jianshe, Xiaodong Jia, Feng Zhu, James Moyne, Jimmy Iskandar, and Jay Lee. 2019. “An Online Virtual Metrology Model With Sample Selection for the Tracking of Dynamic Manufacturing Processes With Slow Drift.” IEEE Transactions on Semiconductor Manufacturing 32 (4): 574–82. doi:10.1109/TSM.2019.2942768.