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Design and fabrication of 1300-line/mm polarization-independent reflection gratings for spectral beam combining.
- Source :
-
Optics Communications . Mar2020, Vol. 458, pN.PAG-N.PAG. 1p. - Publication Year :
- 2020
-
Abstract
- We designed and fabricated polarization-independent multilayer dielectric reflection gratings of 1300 line/mm for spectral beam combining. Because the designed grating has a duty cycle (or fill factor) much greater than 0.5, we used the lift-off process to invert a less-than-0.5 duty cycle photoresist mask to a greater-than-0.5 duty cycle chromium mask. Because the simultaneous polarization-independence and high-angular-dispersion requirements greatly reduce fabrication tolerance, we employed the end-point detection techniques to control accurately the duty cycle and groove depth of the grating profile to reach the design target. The measured polarization-averaged diffraction efficiency of the fabricated gratings was greater than 97% in the wavelength range of 1050 nm–1080 nm. [ABSTRACT FROM AUTHOR]
- Subjects :
- *HOLOGRAPHIC gratings
*FIREPLACES
*DEPTH profiling
*REFLECTIONS
Subjects
Details
- Language :
- English
- ISSN :
- 00304018
- Volume :
- 458
- Database :
- Academic Search Index
- Journal :
- Optics Communications
- Publication Type :
- Academic Journal
- Accession number :
- 141110326
- Full Text :
- https://doi.org/10.1016/j.optcom.2019.124883