Back to Search
Start Over
Defect photoluminescence and structure properties of undoping (InxGa1-x)2O3 films and their dependence on sputtering pressure.
- Source :
-
Journal of Alloys & Compounds . May2020, Vol. 823, pN.PAG-N.PAG. 1p. - Publication Year :
- 2020
-
Abstract
- The (In x Ga 1-x) 2 O 3 thin films were deposited on sapphire substrates by radio frequency magnetron sputtering with increasing sputtering pressure from 0.6 Pa to 1.6 Pa. X-ray diffraction analysis indicated In composition of (In x Ga 1-x) 2 O 3 thin films maintained constant with the increase of sputtering pressure and In content and bandgaps of (In x Ga 1-x) 2 O 3 thin films were estimated to be 6% and 4.78 eV by Vegard's law, respectively. The influence of sputtering pressure on structural and optical properties was discussed in detail. Especially, the origin of different emission of (In x Ga 1-x) 2 O 3 thin films was investigated. The role of V Ga defects on the green emission centered at about 550 nm had been clarified. The energy band diagram of (In x Ga 1-x) 2 O 3 thin film was also proposed with intrinsic defect levels. • In content of (In x Ga 1-x) 2 O 3 films is 6% for all sputtering pressure condition. • Defects play an important role in luminescence. • Green luminescence is related to gallium vacancies. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09258388
- Volume :
- 823
- Database :
- Academic Search Index
- Journal :
- Journal of Alloys & Compounds
- Publication Type :
- Academic Journal
- Accession number :
- 141828554
- Full Text :
- https://doi.org/10.1016/j.jallcom.2020.153903