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High Q Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation.
- Source :
-
Journal of Microelectromechanical Systems . Apr2020, Vol. 29 Issue 2, p135-143. 9p. - Publication Year :
- 2020
-
Abstract
- This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless communication. The sub-6 GHz resonance in this work is achieved by employing the A1 mode in the micromachined Y-cut Lithium Niobate (LiNbO3) thin films. The spurious modes mitigation is achieved by optimizing the distribution of the electric field. The demonstrated figure-of-merit (FoM = Q ⋅ kt2) of 435 marks the first time that a new resonator technology with the FoMs exceeds those of surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) in the sub-6 GHz (1–6 GHz) frequency range. [2019-0241] [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 29
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 142582101
- Full Text :
- https://doi.org/10.1109/JMEMS.2020.2967784